发明名称 Metal organic chemical vapor deposition of 111-v compounds on silicon
摘要 Expitaxial composite comprising thin films of a Group III-V compound semiconductor such as gallium arsenide (GaAs) or gallium aluminum arsenide (GaAlAs) on single crystal silicon substrates are disclosed. Also disclosed is a process for manufacturing, by chemical deposition from the vapor phase, epitaxial composites as above described, and to semiconductor devices based on such epitaxial composites. The composites have particular utility for use in making light sensitive solid state solar cells.
申请公布号 US4588451(A) 申请公布日期 1986.05.13
申请号 US19840604835 申请日期 1984.04.27
申请人 ADVANCED ENERGY FUND LIMITED PARTNERSHIP 发明人 VERNON, STANLEY M.
分类号 H01L21/205;H01L27/14;H01L29/267;H01L31/0304;H01L31/18;(IPC1-7):H01L21/205 主分类号 H01L21/205
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