| 摘要 |
PURPOSE:To prevent the adhesion of conductive fine particles to matter to be treated, by interposing a dielectric material between at least one of an exciting electrode and an ion draw-out electrode and the matter to be treated within the space between both electrodes so as to cover the surface of at least one of both electrodes. CONSTITUTION:Matter 18 to be treated is inserted in the treatment space 12 between an exciting electrode 11 and an ion draw-out electrode 14. When high AC voltage is applied between an opposed electrode 9 and the exciting electrode 11, the gas in the space 12 is ionized on the surface of the exciting electrode 11 to generate plasma. Because an electric field, wherein electrons are directed to the ion draw-out electrode 14 from the exciting electrode 11, is generated in the treatment space 12, the surface of the matter 8 in the side of the exciting electrode 11 is activated by the minus ion in the plasma. A dielectric material 13 is interposed between the matter 8 and the ion draw-out electrode 14 and the plasma ion generated from the exciting electrode 11 is prevented from local concn. |
