| 摘要 |
PURPOSE:To make it possible to make a super clean space where the diffusion of dusts and dirts is small by setting a small opening degree of floor plates close to an under-floor return port, and setting a large opening degree of floor plates farther from the return port. CONSTITUTION:The opening degree of floor plates 6 are made larger from the position of an air return port 8 successively in the order of a region (a), a region (b) and a region (c). As a result, in the air flow the concentration of an air current to parts close to the air return port 8 is reduced as shown by arrow 11, and the horizontal air flow is substantially eliminated. Thus, the air flow becomes substantially a vertical air flow, and a down flow is realized. As a result, diffusion of dusts and dirts can be prevented, and improvements in the yield of the product and reliability therefor are realized. |
