| 摘要 |
PURPOSE:To achieve a low cost and high reliability by a method wherein a substrate with a non-infrared rays transmitting film stuck thereon for transmitting infrared rays is used to form a plurality of cold aperture patterns simultaneously, which are fastened integral on an infrared rays detection element after being separated. CONSTITUTION:An aluminum metal film 22 impervious to infrared rays is evaporated on a zinc sulfide substrate 21 transmitting visible light and infrared rays and then, a silicon dioxide film 23 is evaporated as insulating film. A photoresist film is formed on the film 23 covering it and then, after the formation of the photoresist film into a specified pattern, the films 23 and 22 are etched away sequentially to form a specified pattern opening 24. Then, the substrate 21 is cut to a specified dimension on a dotted line 25 and the substrate 21 thus cut is set on a bonding pad 30 on an electrode of a semiconductor infrared rays detection element 28 which is fastened on a cooling base 26 with an adhesive material 27 with the film 23 side thereof facing the side of the pad 30. The substrate 21 is fastened on the pad 30 so as to have the center of the opening 24 aligning the center position of the element 28. Thus, a low cost and a high reliability can be achieved. |
