| 摘要 |
PURPOSE:To enable the formation of a number of linear open grooves at low cost and with high productivity, by making large or long the spot area of a pulse laser beam of a specified wavelength, by arranging cylindrical lenses in parallel, and by forming/the liner open grooves simultaneously. CONSTITUTION:A pulse laser beam having a wavelength of 400nm or below is applied as a radiant light. Processing is executed simultaneously and instantaneously by one pulse which is formed not in a beam spot of 20-50muphi but in a slit of width 10-20mum (e.g. 15mum) and length 10-50cm, e.g. 30cm. Thereby an efficiency of absorption of an optical energy at CTF is made 100 times or more larger than a YAG laser. When an excimer laser 1 is employed, an initial beam 20 has an area of 16mmX20mm and has 350ml since the efficiency is 3%. This beam is expanded further to have a long or large area by a beam expander 2. Furthermore it is split in the width 15mum of an open groove by a cylindrical lens made of quartz and is condensed. The beam thus formed to have a length 30cm and width 15mum is split into a plurality of beams, and these beams are applied simultaneously to a substance 11 to be processed on a substrate 10, so as to form open grooves 5. |
