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摘要
申请公布号
NL7014087(A)
申请公布日期
1971.04.06
申请号
NL19700014087
申请日期
1970.09.24
申请人
发明人
分类号
H01L21/00;H01L21/311;H01L23/29;H01L23/485;(IPC1-7):01L7/64;01L5/06
主分类号
H01L21/00
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