| 摘要 |
PURPOSE:To detect an observing position easily even if a sample is removed from an ultrasonic microscope by forming a means for forming a flaw which is a mark on a part of the sample in a visual field of the microscope. CONSTITUTION:When an ultrasonic wave 6 generated by applying a pulse 5 from a pulse oscillator 4 to a piezoelectric thin film 2 is transmitted through a cylinder of a spherical lens 1 as a plane wave and reached to a semispherical hole, refraction is generated due to the difference between the sound speeds of quartz and water 8 and the covered ultrasonic waves are irradiated on the surface of the sample 7. The reflected ultrasonic wave is reached to a piezoelectric thin film 2 through the spherical lens 1, an RF signal 9 is received by a receiver 10 and the intensity of the reflection from the surface of the sample 7 which may be generated in accordance with scanning by a sample board driving power supply 13 is displayed on a CRT surface 12. On the other hand, a contact stylus 15 fitted to a fitting board 14 is brought into contact with an optional position on the surface of the sample 7 and a high-voltage pulse is applied to a piezoelectric oscillator 17, so that the point of the stylus 15 is oscillated and the mark can be formed. |
