| 摘要 |
PURPOSE:To form a low aberration lens making uniform its optical property, by forming lens electrodes with a complicated section of a fly's eye lens by piling up plural conductive plates with lens holes. CONSTITUTION:A fly's eye lens used for a multicharge beam exposure system etc. is made by arranging plural Einzel lenses of low aberration and forming them with the first electrode 601, the second electrode 602 and the third electrode 603. And, the second electrode 602 is formed by piling up the first conductive plate 604 with lens hole 608, the second conductive plate 605 with lens hole 609, and the third conductive plate 606 with lens hole 610, using a positioning pin 612, and integrating them with a screw 616 and a nut 620. Thus, the second electrode with a complicated section form can be easily processed with its optical property uniformed, and a fly's eye lens of low aberration can be formed. |
