DEPOSITION AND DIFFUSION SOURCE CONTROL MEANS AND METHOD,申请号EP19840109584-传众专利搜索

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发明名称	DEPOSITION AND DIFFUSION SOURCE CONTROL MEANS AND METHOD
摘要
申请公布号	EP0139134(A3)	申请公布日期	1986.04.30
申请号	EP19840109584	申请日期	1984.08.11
申请人	MOTOROLA, INC.	发明人	ROSE, JOHN W.
分类号	H01L21/205;C23C16/448;C30B25/14;C30B31/16;H01L21/225;(IPC1-7):C30B25/14	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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