发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To enab1e to control the gradations of a liquid crystal using a nonlinear element by a method wherein the nonlinear element is constituted of the laminated material, which consists of three layers of the one conductive type non-single crystal semiconductor layer, which is provided on the light-transmitting insulating substrate, the intrinsic semiconductor layer, which is made to contain carbon by adding methyl silane and is provided on the one conductive type non-single crystal semiconductor layer, and the non-single crystal semiconductor layer, which has the same conductive type as that of the one conductive type non-single crystal semiconductor layer and is provided on the intrinsic semiconductive layer, and has the characteristics of reversely faced rectification. CONSTITUTION:A first electrode 21 constituted of a light-transmitting conductive film 17 of ITO or SnO2 and a light-shielding Cr electrode 11 is provided on a light-transmitting insulating substrate 20 consisting of non-alkali glass and a composite diode 2 consisting of an N type layer 12 of a non-single crystal semiconductor, an I-type layer 13 being made to contain carbon by adding methyl silane and an N type layer 14 having the same conductive type as that of the N type layer 12 is formed on the first electrode 21. Then, an SnO2 or ITO layer 15 and an Al layer 16 are laminated on the composite diode 2, the laminated material is formed as a second electrode 22, and the NiN type nonlinear element is constituted. The threshold values of the I type layer 13 on its front and back interfaces are controlled in such a way to make the stability to bias and a temperature treatment augment. As a result, the gradations of a liquid crystal can be suitably controlled using this nonlinear element.
申请公布号 JPS6184070(A) 申请公布日期 1986.04.28
申请号 JP19840206081 申请日期 1984.10.01
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;MASE AKIRA;KONUMA TOSHIMITSU;MIYAZAKI MINORU;SAKAMA MITSUNORI
分类号 H01L21/205;G02F1/1365;H01L21/77;H01L21/84;H01L29/861;H01L29/868 主分类号 H01L21/205
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