LENS ADJUSTING METHOD OF CHARGED BEAM OPTICAL BARREL,申请号JP19840204828-传众专利搜索

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发明名称	LENS ADJUSTING METHOD OF CHARGED BEAM OPTICAL BARREL
摘要
申请公布号	JPS6182428(A)	申请公布日期	1986.04.26
申请号	JP19840204828	申请日期	1984.09.29
申请人	TOSHIBA CORP	发明人	NAKASUJI MAMORU
分类号	H01J37/305;H01J37/304;H01L21/027	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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