发明名称 APPARATUS FOR HANDLING SEMICONDUCTOR DEVICE
摘要 PURPOSE:To simultaneously supply a plurality of semiconductor devices to and discharge them from measuring sections, by feeding the devices into a plurality of measuring sections and by distributing the devices fed from the measuring sections to a plurality of conveyor chains. CONSTITUTION:A handling apparatus has a vertical conveying path 1. Two measuring sections 2a and 2b are arranged vertically in the conveying path 1. Two horizontal semiconductor device supplying conveyor chains 3a and 3b, which are arranged horizontally in upper and lower stages, are connected in parallel to the upper supplying side of the conveying path 1, while two semiconductor device receiving conveyor chains 4a and 4b, which are arranged horizontally in upper and lower stages, are connected in parallel to the lower discharging side of the path 1. These conveyor chains 2a and2b, and 4a and 4b are connected to semiconductor device supplying sections 5a and 5b and to receiving sections 6a and 6b, respectively. Semiconductor devices caused to fall down are stopped at the measuring sections 2a and 2b by a detector 7 for the detecting passage of semiconductor devices and by stopper pins 8a and 8b. A conveying path closing block 9 is activated by a detection signal from a detector 10 for detecting passage of devices so that the devices are entering into the lower chain 4b.
申请公布号 JPS6181646(A) 申请公布日期 1986.04.25
申请号 JP19840203162 申请日期 1984.09.28
申请人 NEC CORP 发明人 TANABE AKITO
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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