| 摘要 |
A laser beam machining apparatus includes a working laser beam for machining a workpiece and a visible laser beam which is made coincident therewith. The coincident laser beams are scanned along the X-Y plane of a surface to be machined by a pair of optical scanners. The movement of the optical scanners is controlled as a function of machine signals indicative of the desired movement of the laser beam and compensation signals indicative of the temperature drift of the optical scanners. A camera detects the instantaneous position of the visible lens as it is scanned along the surface to be machined and generates output signals indicative thereof. The output signals are compared to the machining signals to determine the temperature drift of the optical scanners and the compensating signals are generated as a function thereof.
|
