| 摘要 |
<p>PURPOSE:To improve the light condensing efficiency of a condenser lens by providing a thin film, whose refractive index is higher than that of the condenser lens, on the surface of the condenser lens of a color separation filter. CONSTITUTION:Photodiodes 2 and an Al wirings 3 are formed on the surface of a silicon substrate 1 and a foundation film 4 is adhered onto them, and the first color filters 5 are formed in selected positions corresponding to photodiodes 2 on the foundation film 4, and an intermediate film 6 is formed on the foundation film 4, and the second color filter 7 are formed in selected positions corresponding to photodiodes 2 on the intermediate film 6, and a protective film 8 is formed on the intermediate film 6. Microlenses 9 are formed in selected positions on the first and the second color filters 5 and 7, and a thin film 10 whose refractive index is higher than that of the microlens 9 is formed on the microlens 9.</p> |
