| 发明名称 |
Planetary substrate carrier. |
| 摘要 |
<p>An inexpensive, multiple substrate carrier for high-temperature, high-vacuum film deposition systems. The carrier (10) includes a plurality of vertically oriented sheaves (15) on which substrates (12) ride during simultaneous, two-sided, substantially uniform deposition of film material.</p> |
| 申请公布号 |
EP0178186(A2) |
申请公布日期 |
1986.04.16 |
| 申请号 |
EP19850307326 |
申请日期 |
1985.10.14 |
| 申请人 |
HEWLETT-PACKARD COMPANY |
发明人 |
BLOOMQUIST, DARREL R.;DRENNAN, GEORGE A.;OPFER, JAMES E. |
| 分类号 |
C23C14/50;C23C16/44;C23C16/458;(IPC1-7):C23C14/50 |
主分类号 |
C23C14/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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