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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6169965(A)
申请公布日期
1986.04.10
申请号
JP19840192847
申请日期
1984.09.14
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SAKAI IKUO;SUMITA ISAO;NAKAYAMA YASUHIKO
分类号
C23C14/42
主分类号
C23C14/42
代理机构
代理人
主权项
地址
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