发明名称 DEVICE FOR PULLING UP SINGLE CRYSTAL
摘要 PURPOSE:To prevent the fracture of a single crystal owing to the oscillation in the event of an earthquake, etc. by controlling an actuator by the output signals from acceleration detectors and suppressing the acceleration to be applied to a main body to a min. level. CONSTITUTION:The displacement signals or acceleration signals of the main body 3 or a supporting part 4 integral with the body 3 are inputted to a control part 9 from the acceleration detectors 11, 12 installed to the body 3 and a displacement detector 10 for detecting the relative displacement between the supporting part 4 and an outside foundation, i.e., a rail 5 when the earthquake arises. The control part 9 operates the actuator 8 so as to decrease the acceleration and displacement of the body 3 thereby acting the force separate from the seismic power to the body 3 or the part 4. Since a drawback movement and attenuation effecting part 7 is also installed to the part 4 for the body 3, the proper drawback force and attenuation force are acted to the body 3 or part 4 by said part, by which the exertion of the seismic power to the device for pulling up the single crystal is effectively prevented cooperatively with the actuator.
申请公布号 JPS6168390(A) 申请公布日期 1986.04.08
申请号 JP19840189377 申请日期 1984.09.10
申请人 MITSUBISHI STEEL MFG CO LTD;FUJITA TAKASHI 发明人 TAKANO TETSUO;FUJITA TAKASHI;KOMI TOSHIO
分类号 C30B15/00;C30B15/22;H01L21/02;H01L21/208 主分类号 C30B15/00
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