| 摘要 |
PURPOSE:To make uniform the density of irradiation energy as well as to improve the reproducibility of an irradiation process by a method wherein a radiation rays rotating means, with which the rays projected on the material to be processed located on a rotating stand are equivalently rotated with the rotating angle of the rotating stand, is provided. CONSTITUTION:A clutch is coupled to the tips 38, 39, 48 and 49 of the X-Y movable screws of X-Y stages 33 and 34, and four wafers (11-14) are shifted in such a manner that their center parts are positioned at the point directly below the four windows of a beam mask 21 through the intermediary of a motor. A turn table 2 is rotated at a constant speed through the intermediary of a rotation controlling circuit 9, and a linear electron beam 5 is emitted from an electron beam source 6. At this time, the beam source 6 is rotatingly moved by a motor 71 at the same speed as the turn table 2 in such a manner that the longitudinal direction of the linear beam is in parallel with the straight line which links the center of the wafer 1 and the center of the turn table 2. Said rotatable movement of the beam source is repeatedly performed on each sample. |
