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发明名称
VAPOR GROWTH EQUIPMENT
摘要
申请公布号
JPS6165419(A)
申请公布日期
1986.04.04
申请号
JP19840186585
申请日期
1984.09.07
申请人
TDK CORP
发明人
KAMETANI MINORU;MIYAUCHI EISAKU;ISHII TOMOKI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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