NON-CONTACT TYPE FINE DISPLACEMENT METER,申请号JP19840186470-传众专利搜索

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发明名称	NON-CONTACT TYPE FINE DISPLACEMENT METER
摘要
申请公布号	JPS6165109(A)	申请公布日期	1986.04.03
申请号	JP19840186470	申请日期	1984.09.07
申请人	CANON INC	发明人	TAKAHASHI KAZUO
分类号	H01L21/67;G01B7/00;G01B21/00;H01L21/66	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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