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发明名称
INSTALLATION FOR PRODUCTION OF SINGLE CRYSTAL OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS6163596(A)
申请公布日期
1986.04.01
申请号
JP19840185600
申请日期
1984.09.05
申请人
TOSHIBA CORP
发明人
YONEYA KATSUTOSHI
分类号
C30B15/24;C30B15/22;C30B27/02;H01L21/02;H01L21/208
主分类号
C30B15/24
代理机构
代理人
主权项
地址
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