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发明名称
摘要
申请公布号
JPS6110770(B2)
申请公布日期
1986.03.31
申请号
JP19770061811
申请日期
1977.05.27
申请人
CANON KK
发明人
KAWAMURA NAOTO;MASAKI KATSUMI;SAKUGI KOICHI
分类号
G01J1/02;G01B9/00;G01B11/08;G02B26/10;G02B27/00
主分类号
G01J1/02
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代理人
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