| 摘要 |
PURPOSE:To reduce the weight of transfer stage to realize the rapid motion and to improve the speed and accuracy of position alignment by incorporating a micro motion device with micro positioning device between the transmission device of drive system and moving table. CONSTITUTION:When the amount of motion for a moving table 12 is commanded from outside, a main control device 24 detects the signal issued from position a detector 21, and obtain the information of present position of the table 12, and at the same time starts up the first control device 22. When the table 12 moves to the specified position, the device 24 again calculates the amount of actual movement by the signal sent from device 21, and commands the amount of deviation between the command from outside and the actual movement to the second control device 23. According to the command, the device 23 drives the micro positioning device 3. Subsequently, the device 3 relocate the table 12 slightly against the nut 7, by extending or compressing the elastic substance 15. Thus by providing the device 3, rapid motion of movable stage is realized by reducing its weight, resulting in enhancing rapidness and accuracy of position alignment. |
