| 摘要 |
An electrostatically bonded capacitive pressure measuring transducer constructed with a silicon diaphragm member sandwitched between a top silicon support plate and a bottom silicon support plate each of which has a via hole extending therethrough, a thin layer of borosilicate glass interposed between the diaphragm and each of the support plates, a metallized deposit extending through the via holes and over a part of the surface of each of the glass layers opposite the diaphragm to form with the diaphragm two variable capacitors which will be electrically contacted by spring loaded plunger type contacts, and a layer of platinum silicide deposited on the top of the silicon diaphragm and the top of each of the silicon plates as an electrical contact coating providing a contact surface for the plunger type contacts. |
