| 摘要 |
PURPOSE:To utilize a metal source of high purity once treated till the last by holding the surface of a metal source at a certain height, the metal source in a metal source container decreasing in accordance with the number of its growth. CONSTITUTION:A metal source 1 is loaded on a quartz piston 3 moving up and down in a quartz boat 2. A quartz spring 4 is disposed between the quartz piston 3 and the bottom of the quartz boat 2. When the source 1 is decreased by repeating the number of times of its growth, the weight of the source 1 is decreased. The piston 3 is raised by the decrement of the weight owing to restoring force of the spring 4 to hold the surface of the source 1 at a certain height, which allows the source 1 of high purity once treated to be utilized to the last. |
