| 发明名称 |
System for measuring carrier lifetime of semiconductor wafers |
| 摘要 |
A contactless rf technique for measurement of the carrier lifetime from the photoconductivity induced in silicon wafers by a flash of infrared light. The carrier lifetime is inferred from the photoconductivity decay.
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| 申请公布号 |
US4578641(A) |
申请公布日期 |
1986.03.25 |
| 申请号 |
US19820422669 |
申请日期 |
1982.09.24 |
| 申请人 |
EXXON RESEARCH AND ENGINEERING CO. |
发明人 |
TIEDJE, J. THOMAS |
| 分类号 |
G01R31/26;G01R31/265;H01L21/66;(IPC1-7):G01R1/04 |
主分类号 |
G01R31/26 |
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