| 摘要 |
PURPOSE:To make gas detection safe, by providing a column, which concentrates and separates gas for semiconductors, providing the first exciting chamber, in which ultraviolet rays are applied to the gas for semiconductors and a chemical species that can be measured is obtained, and efficiently exciting and detecting the chemical species by a detecting part. CONSTITUTION:A sample of atmosphere 26 is made to pass the column 20 of a gaschromatograph (GC), and only a gas for semiconductors is adsorbed and separated. The temperature of the GC column 20 is increased by a temperature controller 19 and desorption is performed. The gas is sent to the first exciting chamber by nitrogen argon and the like. The gas passes through a quartz spiral pipe 10 and receives ultraviolet rays from an ultraviolet-ray lamp ( I ) 9. The gas is transformed into a chemical species, which can be detected, by a photoluminescence method. The detectable gas is sent to a quartz measuring cell 8. The gas is excited by an ultraviolet lamp (II) 2 again. Thus the clean, safe gas detection, which can be handled simply, can be carried out. |
