| 摘要 |
<p>PURPOSE:To obtain the ratio of the resistance of stable thin-film resistor circuits having high accuracy by each forming second resistors of integral times as large as a first resistor to contacts among the first resistor and the whole length of a thin-film resistor and a wiring body. CONSTITUTION:An NiCr thin-film is evaporated onto a substrate, a thin-film 4 in a rectangular shape in length of l3+2x (l3 represents the length of the thin- film), thickness (d) and width (w) is prepared, and a thin-film resistor R3, both sides thereof have metallic wiring bodies 3 and contacts having the area of xXw, is prepared. When the thin-film 4 in the resistor R3 is etched and formed, a thin-film 5 in length of l4+2x and width (w) and a thin-film 5' in length of l'4+2x and width (w) are prepared simultaneously through an etching technique, and a thin-film resistor R4 having wiring bodies 3 on both sides and contacts having the area of x+w is formed. When the relationship of l4+l'4=2Xl3 is maintained at that time, 1:2 is realized with high accuracy in the ratio of resistance R3:R4 of the resistor R3 to the resistor R4.</p> |
