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发明名称
UTENSILE DI AFFERRAMENTO E DISPOSITIVO DI TRASPORTO PER MANIPOLARE PIASTRINE DI SEMICONDOTTORI
摘要
申请公布号
IT1118869(B)
申请公布日期
1986.03.03
申请号
IT19790049390
申请日期
1979.06.12
申请人
CODI CORP
发明人
分类号
H01L21/67;B65G7/12;H01L21/02;H01L21/22;H01L21/687;(IPC1-7):H01C/
主分类号
H01L21/67
代理机构
代理人
主权项
地址
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