| 摘要 |
PURPOSE:To make possible exact measurement by providing a collimator having a vacuum chuck port which can fix a sample to the end of a probe contg. a detecting element of an X-ray detector therein. CONSTITUTION:A glass microballoon (GMB)20 carried to the position approximately right under the vacuum chuck port 7 by the stepping of a conveyor 10 is attracted and fixed to the port 7 by the strong sucking force generated when a vacuum pump is operated and the air near the through-hole 7a is discharged through a hollow space 6 to the outside of the collimator 5. The fluorescent X-rays (x) are emitted from the GMB20. The X-rays x arrive at the detecting element 1 through the hole 7a, the hollow space 6 and a transmission window 4 so that prescribed counting is executed. When the measurement of the fluorescent X-rays with one GMB20 is completed, the operation of the vacuum pump is stopped or a regulating valve provided to a discharge pipe 8 is opened to release the measured GMB20 from the port 7. The removed GMB is returned to the conveyor 10 and the conveyor 10 is stepped so as to be ready for the next measurement. |
