| 摘要 |
PURPOSE:To make an effective gap length similar to a virtual gap length, and to improve the frequency characteristic by removing a working affected layer of a polishing surface by a dry etching method, before forming a non-magnetic film. CONSTITUTION:A gap opposed surface 2 of a magnetic material block 1 consisting of ferrite, etc. is polished mechanically, and thereafter, it is brought to dry etching by an ion milling device. That is to say, the magnetic material block 1 is installed instead of a sample 11 of the ion milling device, and a working affected layer of a polishing surface is removed by projecting an ion beam 16 from a holo-anode 10. Subsequently, a non-magnetic thin film is formed, and thereafter, unified by an adhesive agent. Therefore, an effective gap length is made similar to a virtual gap length, and the frequency characteristic can be improved. |
