发明名称 |
TREATING METHOD AND DEVICE |
摘要 |
A processing apparatus and method utilize a chamber formed from a pair of casing sections, one of which is movable in to and out of sealing engagement with the other casing section. The movable casing section is equipped to carry a workpiece such that the workpiece is carried by the movable casing section as it moves into and out of sealing engagement with the other casing section and such that the workpiece is delivered to a processing station associated with the other casing section when the two casing sections are in sealing engagement with each other. |
申请公布号 |
JPS6134948(A) |
申请公布日期 |
1986.02.19 |
申请号 |
JP19850109193 |
申请日期 |
1985.05.21 |
申请人 |
MACH TECHNOL INC |
发明人 |
GIYARII HIRUMAN;RICHIYAADO HOWAADO RUBIN |
分类号 |
H01L21/027;C23C16/54;H01L21/00;H01L21/677 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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