| 摘要 |
PURPOSE:To prevent ultra-thin articles such as, for example, semiconductor wefers, from being damaged and to enhance the yield thereof, by holding a resin cartridge in which the ultra-thin parts are stored, and a quartz jig, in opposite to each other, and by transferring the articles therebetween at one stroke with the use of article pushing means. CONSTITUTION:Article pushing means 3a, 3b are set, respectively in groove-like guide means 2a, 2b formed in both end parts of a long base plate section 1. First and second article storing sections 4, 5 are rotatably journalled to bearings 4a, 5a in the vicinity of the inner ends of the guide means 2a, 2b. A resin cartridge 12 in which plural pieces of articles are stored is stored in the first storing section 4, and a quartz jig 13 formed therein with a plurality of grooves 14 in which the articles 11 may be stored is stored in the second storing section 5. Further, upon shifting of the articles 11 into the quartz jig 13, the storing sections 4, 5 are rotated to be opposed to each other, and a pushing means 3a is therefore moved rightward, thereby the articles 11 may be shifted into the quartz jig 13 at one stroke in association with the rightward movement of the pushing member 3a. |
