| 摘要 |
PURPOSE:To improve the cooling capacity by adopting a single crystal sapphire plate as a light transmission shielding plate of a reaction chamber side of two shielding plates, thereby enabling to effectively utilize a window. CONSTITUTION:A light source chamber side of two shielding plates is formed of a quartz plate 10', and a reaction chamber side is formed of a single crystal sapphire plate 10. Cooling gas at 0 deg.C or lower discharged from a liquid nitrogen or liquified carbon dioxide gas is fed to an air gap 11 between a quartz plate 10' and a sapphire plate 10. Then, the plate 10 becomes approximately the same temperature as the coolant side and the reaction chamber side by the cold temperature from the cooling gas. Accordingly, a window can be effectively used to cool to improve the cooling capacity. |
