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发明名称
摘要
申请公布号
JPS6120035(U)
申请公布日期
1986.02.05
申请号
JP19840103901U
申请日期
1984.07.10
申请人
发明人
分类号
C30B25/10;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C30B25/10
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代理人
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