| 摘要 |
PURPOSE:To provide a clean transfer device to stabilize the quanlity of wafers or the like by preventing the interior of the transfer path from dust. CONSTITUTION:To transfer a container truck 40 from a first air tight chamber 10 to a second air tight chamber 20, a sluice valve plate 33 is opened, a valve plate 34 closed, a bumping plate 31 brought down and a bumping plate 32 erected. A clean air inlet valve 12 is opened, and outlet valve 14 closed, an inlet valve 22 closed and an outlet valve 24 opened. Under this condition when a blower 25 is driven, clean air is introduced from a intake pipe 11 through a high performance filter 16 and exhausted from an exhaust pipe 23. Thus, air flow from the air tight chamber 10 to the air tight chamber 20 is generated to act on a pressure receiving plate 43 and urge the truck 40 to said chamber 20. The transfer speed of the truck 40 is sensed by sensors 61-64 to adjust the openings of an air regulating valve 28 and outlet valve 24 or the rotational speed of the blower 25 so that the truck 40 is decelerated and stopped by the contact with the bumping plate 32. Thus, since the truck is transferred by air flow and further pressure in the chamber is lower than that in a transfer container, dust hardly enters the container. |
