| 摘要 |
PURPOSE:To enable the sample to be measured in a hard vacuum by exhausting the gas emitted by the sample while it is separated from a vacuum atmosphere containing lead wires, terminal resistors, etc. emitting a great amount of gas. CONSTITUTION:A sample 11 is mounted on a separator plate 12. The periphery of the separator plate 12 is provided with separation bellows 13 to separate the sample 11 from the vacuum atmosphere of a sample chamber 15. The gas emitted by the sample 11 is exhausted from an exhaust hole 16 after passing through the hole of a magnetic field lens 10. The separator plate 12 is fixed over an X- axis stage 19a and a Y-axis stage 19b. It can be arbitrarily moved by a driving mechanism 20. Lead wires 17 are connected to an LSI power supply 23. The sample chamber 15 is exhausted through an exhaust hole 28. In an absorption cylinder 25, secondary electrons 24 produced from the sample 11 are introduced above the magnetic field lens 10 and detected by a secondary electron detector 27. Consequently, it is possible to measure the sample 11 in a hard vacuum. |
