| 摘要 |
PURPOSE:To obtain a fine adjustment which has high accuracy, high reliability and long life by forming a clamping piezoelectric element engaged with a movable shaft of a laminate interposed with electrodes and coating a plurality of divided insulating wear resistant film on the inner periphery. CONSTITUTION:In a device for controlling the fine movement of a shaft 9 by controlling an electric field applied to piezoelectric elements 10, 11, 14 by engaging cylindrical clamping piezoelectric elements 10, 11 with an axially movable shaft 9, and providing a driving piezoelectric element 14, the elements 10, 11 are formed of piezoelectric materials polarized and laminated axially of the shaft 9 and internal electrodes 25 inserted to between the materials. A plurality of wear resistant films 29 having insulation divided by grooves 30 are coated on the surfaces contacted with the shaft 9 of the elements 10, 11. |
