| 摘要 |
PURPOSE:To eliminate the stagnancy of gas to prevent a fine powder or peeled pieces from being caught into a film on a substrate, by providing exhaust ports near both ends of the substrate and an electrode. CONSTITUTION:The first exhaust port 6 is provided under lower parts of both of a cylindrical substrate 1 and a cylindrical electrode 2 which is arranged with the same axis as the substrate 1, and the second exhaust port 6' is provided on their upper end parts. Exhaust ports 6 and 6' are connected to a common vacuum pump 7 through exhaust control valves 9 and 9' respectively. Gas passes a gas chamber 3 from an introducing entrance 4 and is mixed and dispersed uniformly and is blown to a discharging area between the electrode 2 and the substrate 1 and is discharged from upper and lower end parts through exhaust ports 6 and 6' as shown by arrows. Thus, the stagnancy of gas near end parts of the cylindrical substrate is eliminated to prevent the occurrence of fine powder. |
