摘要 |
PURPOSE:To improve the rising characteristic by adding the second evacuating step in vacuum and removing excess N2, O2, H2O mixed in a laser medium circulating system, thereby stabilizing a discharge. CONSTITUTION:When a laser medium is supplied to a discharge tube of a laser device in case of reoperating, a laser medium circulating system is evacuated in vacuum by the first evacuating step. After the interior of the system is substituted with helium gas (the main content of the laser medium of a carbon dioxide gas laser) in the second evacuating step, it is again evacuated in vacuum. Before operating, excess N2, O2, H2O molecules of impurities in the laser medium mixed in the system can be removed. The laser medium is supplied into the system which is evacuated in vacuum in the second step. |