| 摘要 |
PURPOSE:To provide a titled device which supplies a required quantity of compd. vapor to a required position by the constitution consisting in heating a vessel to evaporate the compd. contained therein and holding a valve body open to eject the vapor from a nozzle through a hole for guiding the compd. vapor. CONSTITUTION:The compd. 1 contained in the cylindrical vessel 12 is heated and evaporated via a heater wire 23 in a vacuum chamber 27 and the compd. vapor filled in the space of the vessel 12 delineated by a valve receiver 19 is ejected in the form of a beam from the nozzle 22 through the hole 13 for guiding the compd. vapor toward the prescribed position by opening the valve body consisting of a plunger 14 and the hole 13. Said plunger 14 opens and closes the above- mentioned valve body when the plunger is actuated via a rod 16 by a cylinder 15 attached to the outside of the vacuum vessel 27. The heater wire 23 disposed on the outside circumferential surface of the vessel 12 adjusts the evaporation rate of the compd. 1 under the control by a thermocouple 24 and a control device (not shown in figure). |
