摘要 |
PURPOSE:To attain to enhance the stability and heat resistance of a resistor, by providing a heat resistant layer comprising insulating ceramic having high heat stability between a resistor and a heat resistant resin. CONSTITUTION:A heat insulating layer 2 comprising a heat resistant resin is provided on a substrate 1. A heat resistant layer 3 comprising insulating ceramic is provided on this heat insulating layer 2, and a conductor 5 and a protective layer 6 are further povided on a resistor 4. As the heat resistant resin used in the heat insulating layer 2, a material having high dissociation temp. and excellent heat resistance such as aromatic polyamide, polyimide, polysulfone or polyphenylene oxide is advantageous. By providing this heat resistant layer comprising ceramic, the diffusion of elements such as oxygen, nitrogen, carbon, hydrogen or sulfur constituting the heat insulating layer 2 to the resistor is prevented and the stability of a resistance value is enhanced. |