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发明名称
WAFER TRANSFER METHOD
摘要
申请公布号
JPS6112041(A)
申请公布日期
1986.01.20
申请号
JP19840132532
申请日期
1984.06.27
申请人
MATSUSHITA DENKI SANGYO KK
发明人
YAMAMOTO SHIGEYUKI;YAMAGUCHI YOSHIO;TAKI YASUO
分类号
H01L21/677;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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