HANDLING METHOD FOR HANDLING DEVICE,申请号JP19840131471-传众专利搜索

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发明名称	HANDLING METHOD FOR HANDLING DEVICE
摘要
申请公布号	JPS6110252(A)	申请公布日期	1986.01.17
申请号	JP19840131471	申请日期	1984.06.26
申请人	NIPPON DENKI KK	发明人	KAWAMATA IKUO
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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