| 摘要 |
PURPOSE:To reduce the probability of producing dusts in a clean room by moving a carrier in the state attracted by an attracting magnet disposed movably out of the upper room of the clean room. CONSTITUTION:When an article 4 to be conveyed is placed on a conveying pallet 5 to excite an electromagnet 7 by an electromagnet controller 14, the electromagnet 7 attracts a pole 6 to be attracted and the pallet 5 secured with the pole through a partition wall 3 to magnetically levitate in a clean room 1. A proximity sensor 13 detects a levitating gap of the pallet 5, and an electromagnet controller 14 controls the attracting force of the electromagnet 7 so that a levitating gap coincides with a set gap. When the magnetic levitation of the pallet 5 is completed, a self-traveling truck 8 is driven, and the pallet 5 moves together with the truck while remaining the magnetically levitating state. Power is supplied to the truck 8 by a current collector 15. |
