发明名称 METHOD AND APPARATUS FOR TESTING CHARACTERISTIC OF INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To accurately detect an abnormality generating position in the interior of an integrated circuit device even in a state that the sealing cap body is being adhered on the device by a method wherein conductor patterns not being directly connected electrically with the terminal pins of the substrate and exposed conductor pads connected electrically with the conductor patterns are formed. CONSTITUTION:Conductor patterns 2 are formed on the surface layer part 1a and the internal layer part 1b of a ceramic multilayer substrate 1. Exposed conductor pads 7 are formed on the side of the face of one side of this substrate 1, whereon IC chips 4 are not mounted, in such a way as to array in a lattice type. These pads 7 are electrically connected with the conductor patterns 2, which are not directly connected electrically with the terminal pins 3 of the substrate 1. According to this constitution, when abnormality is perceived in the interior of the IC device, a measurement of the voltage value, the resistance and so forth in each position of the patterns 2 in the interior is performed through the pads 7 before a sealing cap body 6 is dismantled, thereby enabling to accurately grasp the abnormality generating position.
申请公布号 JPS617640(A) 申请公布日期 1986.01.14
申请号 JP19840128920 申请日期 1984.06.22
申请人 TOSHIBA KK 发明人 FUKUOKA YOSHITAKA
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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