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发明名称
SUPPORTING DEVICE FOR SUBSTRATE
摘要
申请公布号
JPS616274(A)
申请公布日期
1986.01.11
申请号
JP19850061064
申请日期
1985.03.27
申请人
RAIBORUTO HEREUSU GMBH
发明人
PEETAA MAARAA
分类号
C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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