| 摘要 |
PURPOSE:To prevent generation of a leakage current among the external terminals of a semiconductor device by measuring the characteristic with spraying a cooling agent from the upper surface under the condition that an elastic substance is in contact with the side periphery of a container of the semiconductor device from which plural external terminals are led out. CONSTITUTION:A square openining is arranged in the center of a substrate consisting of an insulator or metals and contact part 4 made of rubber is stuck to the inner side of said opening. A container 1 is inserted in the opening so that the rubber contact part 4 is in contact with the allover periphery of a side face which is upper from the lead-out part of external terminals 2 and a cooling agent is sprayed from the upper surface of the container 1 as shown by the arrow 5. Thus the electrical characteristics of a semiconductor device in a low-temperature atmosphere can be measured without producing a leakage current among the external terminals 2 of the semiconductor device. |
