AIR-FLOAT WAFER CARRY PATH

摘要

PURPOSE:To reduce the spatial occupation of carry path by making air-holes for carrying in both left and right directions in the wafer carry path. CONSTITUTION:Air-holes 21, 22 for blowing out the air are made in both left and right directions then air for left or right direction carrying is fed under time sharing contol to carry Si wafer bilaterally thus to reduce the spatial occupation.