,申请号JP19820022206-传众专利搜索

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发明名称
摘要
申请公布号	JPS61432(B2)	申请公布日期	1986.01.08
申请号	JP19820022206	申请日期	1982.02.16
申请人	INTAANASHONARU BIJINESU MASHIINZU CORP	发明人	RINDA MERO EPURASU
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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